|
CPW
2870L5, M5, P5
6
kW, 12 kW, 24 kW
200/208
VAC |
|

|
 |
| 6KW/12KW/24KW
DC Sputtering Power Supplies from 200/208V mains (GEN 2.5 Series) |
|
|
CPW 2870A1 |

|
|
15KW/22KW/44KW DC Sputtering Power Supplies from
200/208V mains |
|
|
VPW
2870A4, B5
6
kW, 12 kW
200/208
VAC |
|

|
 |
|
¡@
GEN 1 (water cooled) |
|
Gen 1 (water cooled) Replacement Power Supplies for
both 200/208V & 460/480V for Varian 3290 and M-2000 sputtering
tools. |
|
|
VPW
2870A3, B4
6
kW, 12 kW
460/480
VAC
|
|

|

|
|
Gen 1 (water cooled) Replacement Power Supplies for
both 200/208V & 460/480V for Varian 3290 and M-2000 sputtering
tools. |
|
|
CPW
2870A7
24kW
- 460/480 VAC
¡@ |
 |
| 24KW DC and
36KW DC Sputtering Power Supplies from 460/480V |
|
 |
CPW
2870A8, A9, A10
36kW
- 460/480 VAC |
| 24KW DC and
36KW DC Sputtering Power Supplies from 460/480V |
|
|
CPW
2870B10 & STD Z
36kW
- 460/480 VAC |
 |
|
36KW DC Sputtering Power Supplies from 460/480V with
Integrated Active Arc Suppression |
|
| VPW
2871C2 |
 |
| 3 Channel Arc
Counter to interface with all Active Arc Suppression Units |
|
 |
VPW
2871B2 |
| 3 Channel Arc
Counter to interface with all Active Arc Suppression Units |
|
|

|